Plasma Process Chamber Engineering

Design and control of plasma processing chambers, including heating, gas delivery, electrode configurations, and magnetic field control for uniform and efficient material processing in semiconductor manufacturing.

7,792 US filings from 1,060 companies since 2023 · 2023: 1,941 · 2024: 2,330 · 2025: 2,369 · 2026 YTD: 1,152

Electron / Ion Tubes & Discharge

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#	Company	Since 2023	2023	2024	2025	2026 YTD	YoY
1	Applied Materials, Inc.	1,424	378	424	429	193	+1.2%
2	TOKYO ELECTRON LIMITED	1,298	299	387	416	196	+7.5%
3	Lam Research Corporation	475	140	104	154	77	+48.1%
4	SAMSUNG ELECTRONICS CO., LTD.	368	59	103	121	85	+17.5%
5	ASM IP Holding B.V.	235	52	70	62	51	-11.4%
6	SEMES CO., LTD.	223	62	43	88	30	+104.7%
7	HITACHI HIGH-TECH CORPORATION	162	30	56	58	18	+3.6%
8	Taiwan Semiconductor Manufacturing Company, Ltd.	155	23	51	58	23	+13.7%
9	Kokusai Electric Corporation	116	27	25	37	27	+48.0%
10	Taiwan Semiconductor Manufacturing Co., Ltd.	92	36	26	26	4	0.0%
11	Advanced Energy Industries, Inc.	91	27	28	31	5	+10.7%
12	Beijing E-Town Semiconductor Technology Co., Ltd.	86	17	27	34	8	+25.9%
13	Mattson Technology, Inc.	81	16	27	32	6	+18.5%
14	BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.	79	25	21	29	4	+38.1%
15	NGK INSULATORS, LTD.	59	16	14	17	12	+21.4%
16	TOTO LTD.	42	12	7	13	10	+85.7%
17	PSK Inc.	39	6	16	11	6	-31.2%
18	Kioxia Corporation	33	7	13	5	8	-61.5%
19	MKS Instruments, Inc.	33	14	15	4	·	-73.3%
20	JUSUNG ENGINEERING CO., LTD.	32	9	7	12	4	+71.4%
21	Hypertherm, Inc.	30	7	11	8	4	-27.3%
22	Panasonic Intellectual Property Management Co., Ltd.	29	7	8	10	4	+25.0%
23	KLA Corporation	28	10	10	4	4	-60.0%
24	ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA	27	6	9	10	2	+11.1%
25	ENTEGRIS, INC.	27	9	7	11	·	+57.1%