Lithography Metrology & Inspection

Techniques and apparatus for measuring critical dimensions, overlay accuracy, defect detection, and surface topography in lithographic processes, often involving optical, laser, or charged particle beams.

7,372 US filings from 1,539 companies since 2023 · 2023: 1,977 · 2024: 2,237 · 2025: 2,211 · 2026 YTD: 947

Photolithography

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#	Company	Since 2023	2023	2024	2025	2026 YTD	YoY
1	ASML Netherlands B.V.	901	251	281	279	90	-0.7%
2	KLA Corporation	372	92	118	108	54	-8.5%
3	CANON KABUSHIKI KAISHA	366	107	109	99	51	-9.2%
4	CARL ZEISS SMT GMBH	331	65	94	106	66	+12.8%
5	SAMSUNG ELECTRONICS CO., LTD.	193	35	55	67	36	+21.8%
6	Applied Materials, Inc.	183	54	48	61	20	+27.1%
7	Taiwan Semiconductor Manufacturing Company, Ltd.	177	48	46	57	26	+23.9%
8	ASML Holding N.V.	109	38	38	23	10	-39.5%
9	Taiwan Semiconductor Manufacturing Co., Ltd.	98	35	27	29	7	+7.4%
10	HITACHI HIGH-TECH CORPORATION	88	23	25	34	6	+36.0%
11	Applied Materials Israel Ltd.	79	21	16	29	13	+81.2%
12	MITUTOYO CORPORATION	79	27	21	18	13	-14.3%
13	TOKYO ELECTRON LIMITED	78	20	10	38	10	+280.0%
14	Samsung Display Co., Ltd.	65	12	23	21	9	-8.7%
15	Onto Innovation Inc.	63	12	16	19	16	+18.8%
16	HAMAMATSU PHOTONICS K.K.	56	15	18	17	6	-5.6%
17	Cymer, LLC	51	15	12	16	8	+33.3%
18	NIKON CORPORATION	50	11	17	13	9	-23.5%
19	Nova Ltd.	47	14	14	14	5	0.0%
20	The Boeing Company	44	14	13	15	2	+15.4%
21	AUROS TECHNOLOGY, INC.	43	9	25	7	2	-72.0%
22	NuFlare Technology, Inc.	43	12	12	11	8	-8.3%
23	NANYA TECHNOLOGY CORPORATION	40	17	7	13	3	+85.7%
24	FUJIFILM Business Innovation Corp.	39	13	11	8	7	-27.3%
25	FUJIFILM CORPORATION	39	12	12	11	4	-8.3%