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Ion Implantation Control & Metrology

Methods and apparatus for precise wafer positioning, ion beam uniformity, and dose monitoring during ion implantation processes in semiconductor device manufacturing.

8,852 US filings from 1,840 companies since 2023 · 2023: 2,413 · 2024: 2,514 · 2025: 2,594 · 2026 YTD: 1,331

Electron / Ion Tubes & Discharge

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#CompanySince 20232023202420252026 YTDYoY
1ASML Netherlands B.V.39911911511649+0.9%
2Applied Materials, Inc.357105879966+13.8%
3HITACHI HIGH-TECH CORPORATION3481188210543+28.0%
4SAMSUNG ELECTRONICS CO., LTD.30055859862+15.3%
5FEI Company21853537042+32.1%
6KLA Corporation19555674924-26.9%
7Taiwan Semiconductor Manufacturing Company, Ltd.18342485538+14.6%
8NuFlare Technology, Inc.18059415129+24.4%
9TOKYO ELECTRON LIMITED12130254224+68.0%
10Thermo Fisher Scientific (Bremen) GmbH11618522917-44.2%
11SHIMADZU CORPORATION11130412713-34.1%
12DH Technologies Development Pte. Ltd.10516442817-36.4%
13HAMAMATSU PHOTONICS K.K.10132312810-9.7%
14Applied Materials Israel Ltd.9218263117+19.2%
15JEOL Ltd.883812317+158.3%
16Carl Zeiss MultiSEM GmbH8612233417+47.8%
17CANON KABUSHIKI KAISHA7726192111+10.5%
18Axcelis Technologies, Inc.751993512+288.9%
19Taiwan Semiconductor Manufacturing Co., Ltd.742517248+41.2%
20Micromass UK Limited732726164-38.5%
21ROHDE & SCHWARZ GMBH & CO. KG7310202815+40.0%
22Thermo Finnigan LLC722426157-42.3%
23Kioxia Corporation672921116-47.6%
24CARL ZEISS SMT GMBH6613171818+5.9%
25Carl Zeiss Microscopy GmbH641523197-17.4%