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Charged Particle Beam Optics

Techniques and devices for generating, shaping, focusing, and deflecting electron or ion beams, often involving multi-pole lenses, deflectors, and aberration correction for applications like microscopy or processing.

4,476 US filings from 986 companies since 2023 · 2023: 1,307 · 2024: 1,356 · 2025: 1,268 · 2026 YTD: 545

Electron / Ion Tubes & Discharge

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#CompanySince 20232023202420252026 YTDYoY
1ASML Netherlands B.V.323106988633-12.2%
2FEI Company312737510658+41.3%
3HITACHI HIGH-TECH CORPORATION30396839232+10.8%
4NuFlare Technology, Inc.16454404624+15.0%
5Applied Materials, Inc.11746212921+38.1%
6Carl Zeiss Microscopy GmbH11330333119-6.1%
7JEOL Ltd.9537153310+120.0%
8CANON KABUSHIKI KAISHA8414213514+66.7%
9Carl Zeiss MultiSEM GmbH7710213214+52.4%
10HAMAMATSU PHOTONICS K.K.732128195-32.1%
11Thermo Fisher Scientific (Bremen) GmbH691033197-42.4%
12KLA Corporation601623138-43.5%
13SHIMADZU CORPORATION581722145-36.4%
14DH Technologies Development Pte. Ltd.571418178-5.6%
15Thermo Finnigan LLC492015113-26.7%
16ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH38871211+71.4%
17Micromass UK Limited37141373-46.2%
18CARL ZEISS SMT GMBH3581296-25.0%
19Applied Materials Israel Ltd.3551695-43.8%
20SAMSUNG ELECTRONICS CO., LTD.3471386-38.5%
21THE TRUSTEES OF INDIANA UNIVERSITY2789910.0%
22Axcelis Technologies, Inc.238483+100.0%
23LEICA MICROSYSTEMS CMS GMBH237673+16.7%
24SHINE Technologies, LLC228743-42.9%
25CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE217644-33.3%