Substrate Patterning & Processing

Methods and equipment for applying photoresist uniformly onto wafers, forming patterns through various exposure techniques (e.g., direct imaging, multi-exposure), and integrating patterned layers into semiconductor structures or packaging.

13,853 US filings from 1,268 companies since 2023 · 2023: 4,071 · 2024: 4,167 · 2025: 4,199 · 2026 YTD: 1,416

Photolithography

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#	Company	Since 2023	2023	2024	2025	2026 YTD	YoY
1	TOKYO ELECTRON LIMITED	1,353	361	397	466	129	+17.4%
2	SAMSUNG ELECTRONICS CO., LTD.	873	222	256	279	116	+9.0%
3	Taiwan Semiconductor Manufacturing Company, Ltd.	768	222	231	235	80	+1.7%
4	ASML Netherlands B.V.	664	238	181	183	62	+1.1%
5	Applied Materials, Inc.	651	182	218	198	53	-9.2%
6	CANON KABUSHIKI KAISHA	576	195	154	169	58	+9.7%
7	SHIN-ETSU CHEMICAL CO., LTD.	552	148	131	178	95	+35.9%
8	Kokusai Electric Corporation	549	146	165	199	39	+20.6%
9	SEMES CO., LTD.	504	149	138	160	57	+15.9%
10	SCREEN Holdings Co., Ltd.	352	79	109	127	37	+16.5%
11	Taiwan Semiconductor Manufacturing Co., Ltd.	349	140	101	83	25	-17.8%
12	Lam Research Corporation	266	77	69	97	23	+40.6%
13	FUJIFILM CORPORATION	236	86	71	54	25	-23.9%
14	Kioxia Corporation	214	87	67	44	16	-34.3%
15	ASM IP Holding B.V.	214	60	66	69	19	+4.5%
16	EBARA CORPORATION	184	55	50	56	23	+12.0%
17	Samsung SDI Co., Ltd.	160	24	39	54	43	+38.5%
18	TOKYO OHKA KOGYO CO., LTD.	143	38	37	54	14	+45.9%
19	JSR CORPORATION	138	37	39	39	23	0.0%
20	NISSAN CHEMICAL CORPORATION	135	28	45	43	19	-4.4%
21	NANYA TECHNOLOGY CORPORATION	132	39	36	41	16	+13.9%
22	CHANGXIN MEMORY TECHNOLOGIES, INC.	115	43	40	29	3	-27.5%
23	SUMITOMO CHEMICAL COMPANY, LIMITED	87	38	25	11	13	-56.0%
24	ASML Holding N.V.	84	31	26	21	6	-19.2%
25	INTEL CORPORATION	77	22	32	19	4	-40.6%