Precision Substrate and Wafer Cleaning

Specialized cleaning techniques and apparatus designed for removing microscopic contaminants, residues, or films from sensitive substrates, such as semiconductor wafers or flat panel displays, often involving chemical, mechanical, or plasma-based methods.

5,124 US filings from 801 companies since 2023 · 2023: 1,289 · 2024: 1,589 · 2025: 1,707 · 2026 YTD: 539

Cleaning Processes

Top companies

Ranked by filings in this theme since 2023. 2026 is partial.

#	Company	Since 2023	2023	2024	2025	2026 YTD	YoY
1	TOKYO ELECTRON LIMITED	452	125	140	142	45	+1.4%
2	SEMES CO., LTD.	407	103	105	147	52	+40.0%
3	Applied Materials, Inc.	405	113	139	109	44	-21.6%
4	SCREEN Holdings Co., Ltd.	310	53	109	107	41	-1.8%
5	EBARA CORPORATION	256	57	101	80	18	-20.8%
6	SAMSUNG ELECTRONICS CO., LTD.	255	46	64	101	44	+57.8%
7	Taiwan Semiconductor Manufacturing Company, Ltd.	226	47	85	68	26	-20.0%
8	DISCO CORPORATION	161	40	43	59	19	+37.2%
9	Taiwan Semiconductor Manufacturing Co., Ltd.	128	42	45	31	10	-31.1%
10	Lam Research Corporation	106	32	29	37	8	+27.6%
11	HITACHI HIGH-TECH CORPORATION	63	14	20	26	3	+30.0%
12	Kokusai Electric Corporation	62	21	18	18	5	0.0%
13	SUMCO Corporation	55	13	20	15	7	-25.0%
14	ASM IP Holding B.V.	55	13	17	19	6	+11.8%
15	ENTEGRIS, INC.	41	17	8	11	5	+37.5%
16	GlobalWafers Co., Ltd.	36	9	6	16	5	+166.7%
17	ACM RESEARCH (SHANGHAI), INC.	36	4	18	12	2	-33.3%
18	SHIBAURA MECHATRONICS CORPORATION	35	3	13	16	3	+23.1%
19	Kioxia Corporation	34	12	10	6	6	-40.0%
20	SHINKO ELECTRIC INDUSTRIES CO., LTD.	34	12	8	13	1	+62.5%
21	CHANGXIN MEMORY TECHNOLOGIES, INC.	32	16	12	4	·	-66.7%
22	NISSAN CHEMICAL CORPORATION	31	11	5	8	7	+60.0%
23	FUJIFILM CORPORATION	29	6	9	12	2	+33.3%
24	CANON KABUSHIKI KAISHA	27	6	7	13	1	+85.7%
25	ILLINOIS TOOL WORKS INC.	25	4	13	6	2	-53.8%